New PDF release: Shape and Functional Elements of the Bulk Silicon

By Joachim Frühauf

ISBN-10: 3540221093

ISBN-13: 9783540221098

ISBN-10: 364206048X

ISBN-13: 9783642060489

the assumption for this handbook used to be created through the writer and Birgit Hannemann (now Professor on the college of technologies, Bremen, Germany) as an inner catalogue of result of a number of years of investigations on the Chemnitz collage of expertise, Germany. At this base delivering investigations and the elabo- tion of the manuscript have been supported via the Stiftung Industrieforschung, Bonn, Germany. during this the coworkers of the writer Eva Gartner, Steffi Kronert and Cornelia Kowol have been at once concerned. the entire SEM images consequence from arrangements played on the Centre of - crotechnologies on the Chemnitz collage of know-how (Head: Prof. Thomas Gessner). the writer and his coworkers desire to exhibit their due to Wolfgang Brauer (mask design), Norbert Zichner (processes), Iris Hobelt (SEM photographs) and the coed Karin Preissler (manuscript format support). specifically thank you are as a result of the Stiftung Industrieforschung for the monetary help and to the Springer V- lag for the version of this manual

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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures by Joachim Frühauf


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